Electronic Grade Phosphoric Acid
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The properties of electronic grade phosphoric acid include colorless viscous liquid (42℃), density 1.672g/ml, melting point 42.35℃, boiling point 158℃. Its main function is use for wet cleaning and wet etching of chips, including cleaning before substrate coating, etching and final degumming during photolithography, cleaning and insulating film etching, semiconductor film etching, conductor film etching, organic material etching, etc. in the process of silicon wafer production itself.
Electronic grade phosphoric acid plays an important role in the semiconductor industry, and it is a key chemical. In this industry, ti is wide use for the preparation and cleaning of semiconductor materials. First, let’s understand what phosphoric acid is. Phosphoric acid is an inorganic compound composed of phosphate ions (PO4) and metal ions. It has good solubility and chemical stability, making it an ideal choice in semiconductor manufacturing. However, ordinary industrial grade may contain impurities and other impurities, which is unacceptable for the semiconductor manufacturing process. Therefore, high-purity electronic grade phosphoric acid need. The preparation process of it is very strict and requires multiple levels of refining and purification steps. These steps include ion exchange, distillation, filtration, and ultrapure water washing. Through these processes, impurities and impurities in industrial-grade can remove obtain high-purity it.
Electronic-grade phosphoric acid is of irreplaceable importance in the semiconductor industry. Its high purity and excellent chemical properties make it an ideal choice for the preparation and cleaning of semiconductor materials. With the continuous advancement of semiconductor technology and the increase in demand, the demand for it will continue to grow. Therefore, it is an important topic to research and develop efficient it preparation and purification technology to meet the needs of the semiconductor industry. At the same time, it is also necessary to pay attention to the impact of the production and use of it on the environment to achieve sustainable semiconductor manufacturing.
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